Towards no-drift sensors with on-chip self-calibration

ERC (European Research Council)HORIZON-ERCID: 101116162
EC Contribution
€16,500
Consortium Size
1 orgs
Start Year
2023
Summary

Sensor drift is a major problem for inertial sensors and limits their usage in autonomous navigation applications. Inertial sensor data is integrated to find the position and drift leads to error accumulation. A common drift suppression approach is temperature calibration, but ovenized state of the art sensors still exhibit drift. Instead of using temperature as a drift indicator, I have pursued a non-conventional approach and measured on-chip stress that directly correlates with drift. The device interacts with its surroundings through the anchors and on-chip stress accurately estimates drift. I am the leading researcher in the stress compensation field, and I have recently demonstrated that MEMS gyroscope drift could be eliminated with stress compensation. My long-term stability results at 2 days of averaging are unrivaled, but the calibration algorithm is not practical. Different from temperature calibration, stress calibrating a device is difficult. I propose a sensor system that would convert my proof of concept work into a practical 0-drift sensor with self-calibration. The proposed system consists of a circular MEMS sensor with multiple (~100) distributed stress sensors and piezoelectric stress transducers, a machine learning supported analytical calibration model, a custom ASIC for superior noise, and an FPGA for system control and self-calibration. If successful, the proposed approach would improve the MEMS gyroscope stability by >100X to the levels of 10-4 10-5/h, enabling error-free, only gravity-referenced inertial navigation. Unlike GPS or camera, inertial navigation works under all weather, light, and location conditions providing a stable reference to navigation algorithms. With further miniaturization, 0-drift sensors could fit into smartphones, and reliable indoor navigation would become a reality. The compact, low-cost sensor could also disrupt the precision inertial market dominated by bulky and expensive fiber-optic and laser sensors.

Consortium (1)

Project Results (10)

Source: CORDIS, the EU research results database.

Publications (9)
Achieving Below 200ppm Scale Factor Temperature Stability in an am Gyroscope with On-Chip Stress Sensing
2025 IEEE 38th International Conference on Micro Electro Mechanical Systems (MEMS)· 2025DOI
Mehran Hosseini-Pishrobat, Derin Erkan, Erdinc Tatar
Estimating Temperature-Dependent Glass Substrate CTE via Frequency Measurements in a MEMS Gyroscope
2025 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)· 2025DOI
Mehran Hosseini-Pishrobat, Erdinc Tatar
Exploring the Boundaries of MEMS Gyroscope Scale Factor Temperature Stability via Distributed On-Chip Strain Measurements
Journal of Microelectromechanical Systems· 2025DOI
Mehran Hosseini-Pishrobat, Ahmet Arif Aslan, Erdinc Tatar
Extraction of Thermal Packaging Stress via Intrinsic Silicon on Glass Stress Measurement
2025 23rd International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)· 2025DOI
Ahmet Arif Aslan, Erdinc Tatar
Modeling Temperature Effects in a MEMS Ring Gyroscope: Toward Physics-Aware Drift Compensation
Journal of Microelectromechanical Systems· 2025DOI
Mehran Hosseini-Pishrobat, Erdinc Tatar
Thermal stresses in multiring MEMS gyroscopes: Mathematical modeling with experimental validation
Journal of Sound and Vibration· 2025DOI
Mehran Hosseini-Pishrobat, Erdinc Tatar
Improving the Temperature Stability of MEMS Gyroscope Bias with on-chip Stress Sensors
2024 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)· 2024DOI
Derin Erkan, Erdinc Tatar
On Temperature Effects in a MEMS Ring Gyroscope
2024 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)· 2024DOI
Mehran Hosseini-Pishrobat, Derin Erkan, Erdinc Tatar
Analytical and experimental study of stress effects in a MEMS ring gyroscope
Sensors and Actuators A: Physical· 2023DOI
Mehran Hosseini-Pishrobat, Derin Erkan, Erdinc Tatar
Deliverables (1)
Data Management Plan